surf機2 

      JadeSurf Micro Profiling System (JadeSurf形貌檢測系統)

         JadeSurf是透過光切片來進行特定深度的的檢測系統。解決現在白光AOI的的上下層的散射光干擾,提供三維的高速量測方案。以非破壞的方式、無需前處理的情況下,直接描繪表面微區的三維型貌及粗糙度,可比擬為光學的AFM。同時,針對透明材料中間層的檢測,更是打破傳統光學的限制,透過直接擷取高分辨率的影像,看見其中的各種瑕疵缺陷。

未來將針對產業上的發展趨勢,對於大面積檢測速度的要求,提出高速的混合共聚焦(Hybrid Confocal)的解決方案,讓技術能再下個世代也持續替相關業界痛點做出貢獻。

JadeSurf is an inspection system that transmits light slices to a specific depth. It solves the problem of the interference of scattered light from the upper and lower layers of the current white light AOI and provides a three-dimensional high-speed measurement solution. A non-destructive approach without pre-treatment directly depicts the three-dimensional appearance and roughness of the surface micro-area, which can be compared to optical AFM. At the same time, the detection of the intermediate layer of transparent materials overcomes the limitation of traditional optics. By directly capturing high-resolution images, various flaws and defects can be observed.

In the future, in response to the development trend of the industry and the requirement on the speed for large-area inspection, a high-speed hybrid confocal solution will be proposed, so that the next generation of technology will continue to contribute to solving the pains of related industries.

     3D Microscopy(3D顯微)

透過JadeSurf的Z軸堆疊掃描,觀測到晶圓表面的顯微導線(線寬僅1微米),並驗證其是否正常且無崩塌。透過SEM的驗證,JadeSurf量測的數值準確度與SEM結果並無明顯差異。

Through the z-axis stacking scan equipped on JadeSurf, the microwires on the wafer surface (the linewidth is only 1 micron) are observed and verified to be normal and free of collapse. It is confirmed that there is no significant difference between the numerical accuracy measured by JadeSurf and the SEM results.

                                                   晶元上導線      晶元上導線 崩塌

                                                                                 晶圓上的導線及崩塌區域

                                  晶元上導線 切片

                                                                                橫切面及SEM量測數值對照

 

 

Micro Holes and Microstructures (微小孔洞及細微結構)

在高密度的電路板上, JadeSurf也可以清楚看到傳統白光看不清楚的底孔,並且量測其三維的型貌,鑑定上孔徑、下孔徑、孔深及錐度。雷射加工的細微火山口結構,JadeSurf的切面結果也與SEM結果一致。

On high-density circuit boards, JadeSurf can also clearly see the bottom of blind holes that cannot be seen clearly by traditional white light systems. JadeSurf can further measure three-dimensional shape, identify the upper aperture, lower aperture, hole depth, and taper. For the fine crater structure processed by laser, the section results obtained are also consistent with the SEM results.

 

 

微小孔洞 3維重建

      火山口 光學切面     火山口 SEM

 

 

transparent

      Transparent Materials (透明材料)

由於白光無法清楚對焦,透明材料最難觀測的就是其表面以及有深度的中間層內部的缺陷。JadeSurf可以克服這個難題,連夾藏在玻璃中的刮痕,JadeSurf可以直接針對不同深度層檢測出來。

Because white light systems cannot focus clearly the most difficult thing for transparent materials to observe is the defects on their surface and the interlayer at a certain depth. Jadesurf can overcome this problem, even the scratches hidden in the glass can be directly detected for different depth layers.

 

 

 

光波導

Microchannel Biochip (微流道生物晶片)

微流道生物晶片需設計正確的寬度及深度,方能達成正確的微區化學反應。透過JadeSurf,可以將微流道進乎垂直的溝槽及底部清楚描繪,達成對其流道寬度、深度的非破壞驗證。

The microchannel biochip needs to be designed with the correct width and depth to achieve the correct microchemical reaction. Using JadeSurf the vertical groove and bottom of the microchannel can be clearly depicted, so as to achieve non-destructive inspection of its channel width and depth.

 

 

     Photonic Crystal (光子晶體)

透明的光子晶體是透過表面修飾來達成其繞射及干涉的效果,其表面修飾的成果,透過JadeSurf可以清楚驗證其間距、型貌、深度是否符合預期。

Transparent photonic crystals achieve their diffraction and interference effects through surface modification. The results of surface modification can be seen clearly by using JadeSurf to make sure whether their spacing, shape, and depth meet the expectations.

光子晶體

 

 

     Transparent Light Guide (透明導光板)

透明導光板上透過修飾而能達到均勻的光學照明特性,如果上面多了一些預其之外的紋路,則會大大的降低其特性。在他牌的影像上已做了過多的處理,以致於真實的瑕疵無法精準呈現。透過JadeSurf,可以清楚看到造成導光效率不佳的瑕疵缺陷。

The transparent light guide can achieve uniform optical lighting characteristics through modification. If there are textures not expected, the optical characteristics and performance will be greatly degraded. Usually, other brands do too much processing on the image, so that the real defects can not be accurately presented. By the advantages of using JadeSurf the defects causing poor light guide efficiency can be clearly seen.

 

導光板 1      導光板 2                導光板 他牌

                                                     JadeSurf導光板三維影像                                                                   他牌之導光板三維影像